Temptronic

ThermoChuck Systems

WaferChuckSystem

Temptronic ThermoChucks are conductive heating and cooling systems for wafer testing at temperature. Its primary use is for wafer testing in Probe Stations, as well as Laser Trim and Wafer Burn-in. A few specialized applications include Low leakage probing (fA level), and High voltage probing (up to 10kV).

  • -65C to +300°C
  • 150mm, 200mm & 300mm
  • Retrofits available for existing probe stations

ThermoChuck systems are often highly configured for specific probe stations. Important parameters needed to match your application:

  • Chuck size (diameter)?
  • Temperature range required?
  • Make and model of probe station chuck will be mounted to?
  • Preferred plating on ThermoChuck surface (gold or nickel )?
  • Other considerations (Low noise probing? High voltage probing, etc.)?

150 and 200mm Products

Model Temperatures Cooling Heating
TP03000A -65 to +200°C Mechanical refrigeration, closed loop liquid cooling ThermoElectric
TP03010A +20 to +200°C Open loop air or water cooling* ThermoElectric
TP03010B 0 to +200°C Closed loop glycol/water cooling ThermoElectric
TP03015A +30 to +200°C (+300ºC optional) Open loop air or water cooling* Resistive
TP03015B +30 to +200°C (+300°C optional) Closed loop glycol/water cooling Resistive
Available in 115V or 220V
*User supplies cooling medium

 

300mm Products

Model Temperatures Cooling Heating
TP03500A -55 to +200°C Mechanical refrigeration, closed loop liquid cooling Resistive
TP03500D +20 to +200°C (+300°C optional) Open loop air cooling with Vortex* Resistive
TP03500E +30 to +200°C (+300°C optional) Open loop air cooling* Resistive
Available in 220V   
*User supplies compressed air