WaferChuckSystem

Temptronic - 100px tall

ThermoChuck Systems

Need a Quote?
Application Questions?

Temptronic ThermoChucks are conductive heating and cooling systems for wafer testing at temperature. Its primary use is for wafer testing in Probe Stations, as well as Laser Trim and Wafer Burn-in. A few specialized applications include Low leakage probing (fA level), and High voltage probing (up to 10kV).

• -65 to +300°C
• 150mm, 200mm & 300mm
• Retrofits available for existing probe stations

ThermoChuck systems are often highly configured for specific probe stations. Important parameters needed to match your application:

• Chuck size (diameter)?
• Temperature range required?
• Make and model of probe station chuck will be mounted to?
• Preferred plating on ThermoChuck surface (gold or nickel)?
• Other considerations (Low noise probing? High voltage probing, etc.)?

150 and 200mm Products
Available in 115V or 220V

Model Temperatures Cooling Heating
TP03000A -65 to +200°C Mechanical refrigeration, closed loop liquid cooling ThermoElectric
TP03010A +20 to +200°C Open loop air or water cooling* ThermoElectric
TP03010B 0 to +200°C Closed loop glycol/water cooling ThermoElectric
TP03015A +30 to +200°C (+300°C optional) Open loop air or water cooling* Resistive
TP03015B +30 to +200°C (+300°C optional) Closed loop glycol/water cooling Resistive
*User supplies cooling medium

300mm Products
Available in 220V

Model Temperatures Cooling Heating
TP03500A -55 to +200°C Mechanical refrigeration, closed loop liquid cooling Resistive
TP03500D +20 to +200°C (+300°C optional) Open loop air cooling with Vortex* Resistive
TP03500E +30 to +200°C (+300°C optional) Open loop air cooling Resistive
*User supplies compressed air

 

Four Ways to Contact Us for Support