Temptronic ThermoChucks are conductive heating and cooling systems for wafer testing at temperature. Its primary use is for wafer testing in Probe Stations, as well as Laser Trim and Wafer Burn-in. A few specialized applications include Low leakage probing (fA level), and High voltage probing (up to 10kV).
ThermoChuck systems are often highly configured for specific probe stations. Important parameters needed to match your application:
Model | Temperatures | Cooling | Heating |
---|---|---|---|
TP03000A | -65 to +200°C | Mechanical refrigeration, closed loop liquid cooling | ThermoElectric |
TP03010A | +20 to +200°C | Open loop air or water cooling* | ThermoElectric |
TP03010B | 0 to +200°C | Closed loop glycol/water cooling | ThermoElectric |
TP03015A | +30 to +200°C (+300ºC optional) | Open loop air or water cooling* | Resistive |
TP03015B | +30 to +200°C (+300°C optional) | Closed loop glycol/water cooling | Resistive |
Available in 115V or 220V | |||
*User supplies cooling medium |
Model | Temperatures | Cooling | Heating |
---|---|---|---|
TP03500A | -55 to +200°C | Mechanical refrigeration, closed loop liquid cooling | Resistive |
TP03500D | +20 to +200°C (+300°C optional) | Open loop air cooling with Vortex* | Resistive |
TP03500E | +30 to +200°C (+300°C optional) | Open loop air cooling* | Resistive |
Available in 220V | |||
*User supplies compressed air |